Measurement System
Product:Measurement System
Part No.:MS103
Supplier:SYNWORLD
Product Type:Measurement System

Description:
  • Suitable for 125x125, 156x156, and up to 8wafers
  • High precision Thickness/TTV/Bow/Warp measurement
  • Non-contact measurement, with no wafer surface contamination, minimize breakage
  • Offer best price to performance ratio
  • Easy calibration with data reporting, and exporting data to TXT format
  • Measurement Method: GB/T6619-1995 & GB/T 6620-1995, similar to AST M F533, F534, F657
  • Thickness range: up to 1000um
  • Thickness accuracy: 1.0, 1.5 um (wide probe gap)
  • Repeatability: ? 0.15um, 0.50um (wide probe gap)

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